ECHUCK electrostatic chuck
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ECHUCK electrostatic chuck
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ECHUCK electrostatic chuck
Details Introduction
Echuck is a crucial core component in plasma chambers used in semiconductor manufacturing (ETCH, CVD, IMP equipment). It is a specialized wafer clamping tool, operating under high voltage (5000V) and highly corrosive conditions. It requires high wear and corrosion resistance and must prevent arc discharge. This component is the most critical, highest-tech, and most expensive consumable in the semiconductor Etch process.
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