Vacuum Transfer System
Category：
Vacuum Transfer System
Keywords：
Vacuum Transfer System
Details Introduction
Yuan Lei's T200/300 series vacuum transfer products are born under stringent design standards and manufacturing environments, ensuring high stability and cleanliness during operation in the Fab. Its modular design not only reduces the footprint and improves scalability, but also makes it possible to quickly respond to various layout needs.
|
Serial Number |
Content |
Parameters |
|
1 |
Wafer Size |
200/300mm |
|
2 |
Maximum Temperature |
380℃ |
|
3 |
Pre-vacuum Chamber |
25pc×2 |
|
4 |
Maximum Number of PMs |
4 |
|
5 |
Number of Simultaneously Cooled Wafers |
5pc×2 |
|
6 |
Mechanical Claw Material |
Ceramic/Others |
|
7 |
Cooling Method |
PN₂/Water |
|
8 |
AWC Accuracy/Range |
±0.01mm/6mm |
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Contact Us
Tongling source and semiconductor technology co ltd
Telephone:
Mailbox:zhaolei@aname-nj.com(Manager Zhao)
Address:Electronic Information of Xincheng Office Street West Park, Tongguan District, Tongling City, Anhui Province
Industrial Park Standardization Workshop Building 2