Vacuum Transfer System
Category：
Vacuum Transfer System
Keywords：
Vacuum Transfer System
Details Introduction
The T9 platform, an industrial-grade 12-inch wafer automatic transfer cluster, is autonomously designed and manufactured by Yuanhe Semiconductor. It achieves a cleanliness level of ISO class 1, meeting the requirements of advanced process technologies, and completely replaces similar foreign products. Multi-layer precision coating is achieved in a single molding process, improving the efficiency of customer-required coating reactions and the repeatability between batches.
|
Serial Number |
Content |
Parameters |
|
1 |
Wafer Size |
300mm |
|
2 |
Maximum Temperature |
380℃ |
|
3 |
Aligner | Equipped with Waferaligner and AWC |
|
4 |
Vacuum Degree |
≤10^(-9)pa*m3/s |
|
5 |
Cleanliness Level |
ISO class 1 |
|
6 |
PWP Index (Metal Contamination) |
0.05@0.037um/( |
|
7 |
Transfer Test | ≥5000 pcs cycle test without any errors |
|
8 |
Wafer breakage rate |
≤1/100000 |
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Contact Us
Tongling source and semiconductor technology co ltd
Telephone:
Mailbox:zhaolei@aname-nj.com(Manager Zhao)
Address:Electronic Information of Xincheng Office Street West Park, Tongguan District, Tongling City, Anhui Province
Industrial Park Standardization Workshop Building 2