MO source bottle
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MO source bottle
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MO source bottle
Details Introduction
Yuanlei has independently designed three types of ALD precursor cylinders for different ALD processes: cold source cylinders, hot source cylinders, and dual-port hot source cylinders. These cylinders are made of 316L high-purity stainless steel and come in a wide range of capacities, from the standard 100ml to 600ml. We can also customize large-capacity cylinders to meet customer needs. They feature excellent sealing performance with leak rates as low as 10-9 mbar·L/s and are widely applicable in ALD vacuum coating equipment.
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