Vacuum Transfer System
Category：
Vacuum Transfer System
Keywords：
Vacuum Transfer System
Details Introduction
Yuan and Semiconductor's T10 series of vacuum transfer products are born under stringent design standards and manufacturing environments, ensuring high stability and cleanliness during operation in the Fab. Its modular design not only reduces footprint and improves scalability, but also enables rapid response to various layout needs.
|
Serial Number |
Content |
Parameter |
|
1 |
Wafer Size |
200/300mm |
|
2 |
Maximum Temperature |
380℃ |
|
3 |
Pre-vacuum Chamber |
25pc×2 |
|
4 |
Maximum Number of PMs |
10 |
|
5 |
Simultaneous Cooling Wafer Number |
5pc×2 |
|
6 |
Mechanical Claw Material |
Ceramic/Others |
|
7 |
Cooling Method |
PN₂/Water |
|
8 |
AWC Accuracy/Range |
±0.01mm/6mm |
Related Products
Online message
Thank you for your valuable opinions and suggestions, and we will reply to you in time!
Contact Us
Tongling source and semiconductor technology co ltd
Telephone:
Mailbox:zhaolei@aname-nj.com(Manager Zhao)
Address:Electronic Information of Xincheng Office Street West Park, Tongguan District, Tongling City, Anhui Province
Industrial Park Standardization Workshop Building 2