Mo Yuan bottle
Category:
MO source bottle
Keywords:
MO source bottle
Details Introduction
For different ALD processes, we independently designed and innovated ALD precursor cylinders for sources and semiconductors, including three types: cold source cylinders, hot source cylinders, and dual-port hot source cylinders. These cylinders are made of high-purity 316L stainless steel with a wide range of capacities, from the conventional 100ml to 600ml. We can also customize large-capacity cylinders according to customer needs. They have excellent sealing performance with a leak rate as low as 10-9mbar·L/s and are widely used in ALD vacuum coating equipment.
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