For different ALD processes, we independently designed and innovated ALD precursor cylinders for sources and semiconductors, including three types: cold source cylinders, hot source cylinders, and dual-port hot source cylinders. These cylinders are made of 316L high-purity stainless steel, with a wide range of capacities, from the conventional 100ml to 600ml. We can also customize large-capacity cylinders according to customer needs. They have excellent sealing performance, with a leak rate as low as 10-9mbar·L/s, and are widely used in ALD vacuum coating equipment.
Yuan and Semiconductor's independently designed and manufactured industrial-grade 12-inch wafer automatic transfer cluster T9 platform achieves an ISO class 1 cleanliness level, meeting the requirements of advanced process technology. It is a complete replacement for similar foreign products, featuring multi-layer precision coating in a single molding process, thereby improving the efficiency of customer-required coating reactions and the repeatability between batches.
Contact Us
Tongling source and semiconductor technology co ltd
Telephone:
Mailbox:zhaolei@aname-nj.com(Manager Zhao)
Address:Electronic Information of Xincheng Office Street West Park, Tongguan District, Tongling City, Anhui Province
Industrial Park Standardization Workshop Building 2