Products
Source and Semiconductor's high-vacuum, direct-drive transfer gate valve boasts fully independent intellectual property rights. Suitable for load locks and vacuum chamber isolation, it's widely used in vacuum coating equipment, optoelectronic industries, and other clustered vacuum systems. The sealing device features quick opening and closing, a long operational lifespan, and high airtightness, playing a key role in isolating and connecting various vacuum chambers.
Yuan and Semiconductor's high-vacuum fast-slow dual-speed angle valve boasts completely independent intellectual property rights. This type of vacuum valve is specialized for use in vacuum systems to alter airflow direction and regulate flow volume. It features fast and slow operational modes, allowing for flexible adjustment based on specific needs to accommodate various vacuum processing procedures. Due to its unique functionality and wide range of applications, it plays a significant role in vacuum technology.
Yuan and Semiconductor's APC high-speed pressure-controlled butterfly valve boasts completely independent intellectual property rights. It integrates pressure control, motion structure, and sealing into a single high-vacuum valve. Its primary function is to control, regulate, and isolate the gas flow rate and volume in a vacuum system by adjusting the valve plate angle through an adaptive algorithm, thereby achieving precise regulation and control of gas flow and vacuum pressure in vacuum equipment during different processes or procedures.
For different ALD processes, Yuanlei has independently designed three types of ALD precursor cylinders: cold source cylinders, hot source cylinders, and dual-port hot source cylinders. These cylinders are made of 316L high-purity stainless steel and have a wide range of capacities, from the conventional 100ml to 600ml. We can also customize large-capacity cylinders according to customer needs. They have excellent sealing performance with a leak rate as low as 10-9 mbar·L/s and can be widely used in ALD vacuum coating equipment.
Contact Us
Tongling source and semiconductor technology co ltd
Telephone:
Mailbox:zhaolei@aname-nj.com(Manager Zhao)
Address:Electronic Information of Xincheng Office Street West Park, Tongguan District, Tongling City, Anhui Province
Industrial Park Standardization Workshop Building 2