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Product Description
Yuan and Semiconductor possesses fully independent intellectual property rights for its high-vacuum, direct-acting transfer gate valve, suitable for load locks and vacuum chamber isolation. It is widely used in vacuum coating equipment, optoelectronic industries, and other clustered vacuum systems. The sealing device has advantages such as fast opening and closing, high repetitive operating life, and high airtightness, playing a key role in isolating and connecting various vacuum chambers.
|
Serial Number |
Content |
Parameters |
|
1 |
Size |
8/12 inch |
|
2 |
Operating Pressure |
1.0×10⁵~10-6 Pa |
|
3 |
Driving Pressure |
0.5~0.6 Mpa |
|
4 |
Actuation Pressure Difference |
<4 kPa |
|
5 |
Leakage Rate (Valve Plate) |
1.3×10-9mbar·L/s |
|
6 |
Operating Temperature |
Valve Plate 5~120℃/Actuator 60℃ |
|
7 |
Actuation Time |
0.6~1s |
|
8 |
Lifespan |
≥1,000,000 cycles |
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Contact Us
Tongling source and semiconductor technology co ltd
Telephone:
Mailbox:zhaolei@aname-nj.com(Manager Zhao)
Address:Electronic Information of Xincheng Office Street West Park, Tongguan District, Tongling City, Anhui Province
Industrial Park Standardization Workshop Building 2