Vacuum Transfer System
Vacuum Transfer System

YichangVacuum Transfer System

Yuan and Semiconductor's T10 vacuum transmission series products are born under rigorous design standards and manufacturing environments, ensuring high stability and cleanliness of the equipment during operation in the Fab. Its modular design not only reduces the footprint and improves scalability, but also enables rapid response to various layout needs.

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YichangVacuum Transfer System

Phone: 400-888-8888

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Product Description

Yuan and Semiconductor's T10 series of vacuum transfer products are born under stringent design standards and manufacturing environments, ensuring high stability and cleanliness during operation in the Fab. Its modular design not only reduces footprint and improves scalability, but also enables rapid response to various layout needs.

 

Serial Number

Content

Parameter

1

Wafer Size

200/300mm

2

Maximum Temperature

380℃

3

Pre-vacuum Chamber

25pc×2

4

Maximum Number of PMs

10

5

Simultaneous Cooling Wafer Number

5pc×2

6

Mechanical Claw Material

Ceramic/Others

7

Cooling Method

PN₂/Water

8

AWC Accuracy/Range

±0.01mm/6mm

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Tongling source and semiconductor technology co ltd
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Address:Electronic Information of Xincheng Office Street West Park, Tongguan District, Tongling City, Anhui Province
Industrial Park Standardization Workshop Building 2

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