LiuanMO source bottle

For different ALD processes, Yuanlei has independently designed three types of ALD precursor cylinders: cold source cylinders, hot source cylinders, and dual-port hot source cylinders. These cylinders are made of 316L high-purity stainless steel and have a wide range of capacities, from the conventional 100ml to 600ml. We can also customize large-capacity cylinders according to customer needs. They have excellent sealing performance with a leak rate as low as 10-9 mbar·L/s and can be widely used in ALD vacuum coating equipment.

Product Description

Yuanlei has independently designed three types of ALD precursor cylinders for different ALD processes: cold source cylinders, hot source cylinders, and dual-port hot source cylinders. These cylinders are made of 316L high-purity stainless steel and come in a wide range of capacities, from the standard 100ml to 600ml. We can also customize large-capacity cylinders to meet customer needs. They feature excellent sealing performance with leak rates as low as 10-9 mbar·L/s and are widely applicable in ALD vacuum coating equipment.