HangzhouMo Yuan bottle

For different ALD processes, we independently designed and innovated ALD precursor cylinders for sources and semiconductors, including three types: cold source cylinders, hot source cylinders, and dual-port hot source cylinders. These cylinders are made of 316L high-purity stainless steel, with a wide range of capacities, from the conventional 100ml to 600ml. We can also customize large-capacity cylinders according to customer needs. They have excellent sealing performance, with a leak rate as low as 10-9mbar·L/s, and are widely used in ALD vacuum coating equipment.

Product Description

For different ALD processes, we independently designed and innovated ALD precursor cylinders for sources and semiconductors, including three types: cold source cylinders, hot source cylinders, and dual-port hot source cylinders. These cylinders are made of high-purity 316L stainless steel with a wide range of capacities, from the conventional 100ml to 600ml. We can also customize large-capacity cylinders according to customer needs. They have excellent sealing performance with a leak rate as low as 10-9mbar·L/s and are widely used in ALD vacuum coating equipment.